PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger; P. Müllner; Stefan Nevlacsil; M. Eggeling; Alejandro Maese-Novo; Florian Vogelbacher; Martin Sagmeister; J. Kraft; Dana Seyringer; Sabine Trupp; Michael Henfling; Svenja Plesshoff; Jan Vaupot; Marcel Sladecek; Elisabeth Rank; Wolfgang Drexler

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger (Speaker, Invited), P. Müllner (Author, Invited), Stefan Nevlacsil (Author, Invited), M. Eggeling (Author, Invited), Alejandro Maese-Novo (Author, Invited), Florian Vogelbacher (Author, Invited), Martin Sagmeister (Author, Invited), J. Kraft (Author, Invited), Dana Seyringer (Author, Invited), Sabine Trupp (Author, Invited), Michael Henfling (Author, Invited), Svenja Plesshoff (Author, Invited), Jan Vaupot (Author, Invited), Marcel Sladecek (Author, Invited), Elisabeth Rank (Author, Invited), Wolfgang Drexler (Author, Invited)

Molecular Diagnostics

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	English
Title of host publication	OSA Optical Sensors and Sensing Congress 2020 Technical Digest
Pages	1
Number of pages	1
Publication status	Published - 2020
Event	OSA Optical Sensors and Sensing Congress 2020 - Duration: 22 Jun 2020 → 26 Jun 2020

Conference

Conference	OSA Optical Sensors and Sensing Congress 2020
Period	22/06/20 → 26/06/20

Research Field

Molecular Diagnostics

Cite this

Hainberger, R., Müllner, P., Nevlacsil, S., Eggeling, M., Maese-Novo, A., Vogelbacher, F., Sagmeister, M., Kraft, J., Seyringer, D., Trupp, S., Henfling, M., Plesshoff, S., Vaupot, J., Sladecek, M., Rank, E., & Drexler, W. (2020). PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications. In OSA Optical Sensors and Sensing Congress 2020 Technical Digest (pp. 1)

@inproceedings{64fe66725cf04ce1acb845b389a39d59,

title = "PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications",

author = "Rainer Hainberger and P. M{\"u}llner and Stefan Nevlacsil and M. Eggeling and Alejandro Maese-Novo and Florian Vogelbacher and Martin Sagmeister and J. Kraft and Dana Seyringer and Sabine Trupp and Michael Henfling and Svenja Plesshoff and Jan Vaupot and Marcel Sladecek and Elisabeth Rank and Wolfgang Drexler",

year = "2020",

language = "English",

pages = "1",

booktitle = "OSA Optical Sensors and Sensing Congress 2020 Technical Digest",

note = "OSA Optical Sensors and Sensing Congress 2020 ; Conference date: 22-06-2020 Through 26-06-2020",

}

Hainberger, R , Müllner, P, Nevlacsil, S, Eggeling, M, Maese-Novo, A, Vogelbacher, F, Sagmeister, M, Kraft, J, Seyringer, D, Trupp, S, Henfling, M, Plesshoff, S, Vaupot, J, Sladecek, M, Rank, E & Drexler, W 2020, PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications. in OSA Optical Sensors and Sensing Congress 2020 Technical Digest. pp. 1, OSA Optical Sensors and Sensing Congress 2020, 22/06/20.

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications. / Hainberger, Rainer (Speaker, Invited); Müllner, P. (Author, Invited); Nevlacsil, Stefan (Author, Invited) et al.
OSA Optical Sensors and Sensing Congress 2020 Technical Digest. 2020. p. 1.

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

TY - GEN

T1 - PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

A2 - Hainberger, Rainer

A2 - Müllner, P.

A2 - Nevlacsil, Stefan

A2 - Eggeling, M.

A2 - Maese-Novo, Alejandro

A2 - Vogelbacher, Florian

A2 - Sagmeister, Martin

A2 - Kraft, J.

A2 - Seyringer, Dana

A2 - Trupp, Sabine

A2 - Henfling, Michael

A2 - Plesshoff, Svenja

A2 - Vaupot, Jan

A2 - Sladecek, Marcel

A2 - Rank, Elisabeth

A2 - Drexler, Wolfgang

PY - 2020

Y1 - 2020

M3 - Conference Proceedings with Oral Presentation

SP - 1

BT - OSA Optical Sensors and Sensing Congress 2020 Technical Digest

T2 - OSA Optical Sensors and Sensing Congress 2020

Y2 - 22 June 2020 through 26 June 2020

ER -