Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

Anahid Naghibzadeh-Jalali; Clemens Heistracher; Alexander Schindler; Bernhard Haslhofer; Tanja Nemeth; Robert Glawar; Wilfried Sihn; Peter De Boer

Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

Anahid Naghibzadeh-Jalali (Author, Invited), Clemens Heistracher (Speaker, Invited), Alexander Schindler (Author, Invited), Bernhard Haslhofer (Author, Invited), Tanja Nemeth (Author, Invited), Robert Glawar (Author, Invited), Wilfried Sihn (Author, Invited), Peter De Boer (Author, Invited)

Data Science & Artifical Intelligence

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	English
Title of host publication	2019 IEEE International Conference on Prognostics and Health Management (ICPHM)
Pages	1-8
Number of pages	8
Publication status	Published - 2019
Event	IEEE International Conference on Prognostics and Health Management (PHM2019) - Duration: 17 Jun 2019 → 19 Jun 2019

Conference

Conference	IEEE International Conference on Prognostics and Health Management (PHM2019)
Period	17/06/19 → 19/06/19

Research Field

Former Research Field - Data Science

Cite this

@inproceedings{cfdd56f3ce6a4a8aa466d4961c031021,

title = "Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning",

author = "Anahid Naghibzadeh-Jalali and Clemens Heistracher and Alexander Schindler and Bernhard Haslhofer and Tanja Nemeth and Robert Glawar and Wilfried Sihn and {De Boer}, Peter",

year = "2019",

language = "English",

isbn = "978-1-5386-8357-6",

pages = "1--8",

booktitle = "2019 IEEE International Conference on Prognostics and Health Management (ICPHM)",

note = "IEEE International Conference on Prognostics and Health Management (PHM2019) ; Conference date: 17-06-2019 Through 19-06-2019",

}

Naghibzadeh-Jalali, A, Heistracher, C, Schindler, A, Haslhofer, B, Nemeth, T, Glawar, R, Sihn, W & De Boer, P 2019, Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. in 2019 IEEE International Conference on Prognostics and Health Management (ICPHM). pp. 1-8, IEEE International Conference on Prognostics and Health Management (PHM2019), 17/06/19.

Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. / Naghibzadeh-Jalali, Anahid (Author, Invited); Heistracher, Clemens (Speaker, Invited); Schindler, Alexander (Author, Invited) et al.
2019 IEEE International Conference on Prognostics and Health Management (ICPHM). 2019. p. 1-8.

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

TY - GEN

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A2 - Naghibzadeh-Jalali, Anahid

A2 - Heistracher, Clemens

A2 - Schindler, Alexander

A2 - Haslhofer, Bernhard

A2 - Nemeth, Tanja

A2 - Glawar, Robert

A2 - Sihn, Wilfried

A2 - De Boer, Peter

PY - 2019

Y1 - 2019

M3 - Conference Proceedings with Oral Presentation

SN - 978-1-5386-8357-6

SP - 1

EP - 8

BT - 2019 IEEE International Conference on Prognostics and Health Management (ICPHM)

T2 - IEEE International Conference on Prognostics and Health Management (PHM2019)

Y2 - 17 June 2019 through 19 June 2019

ER -