Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

Anahid Naghibzadeh-Jalali; Clemens Heistracher; Alexander Schindler; Bernhard Haslhofer; Tanja Nemeth; Robert Glawar; Wilfried Sihn; Peter De Boer

Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

Anahid Naghibzadeh-Jalali (Author, Invited)
, Clemens Heistracher (Speaker, Invited)
, Alexander Schindler (Author, Invited)
, Bernhard Haslhofer (Author, Invited)
, Tanja Nemeth (Author, Invited)
, Robert Glawar (Author, Invited)
, Wilfried Sihn (Author, Invited)
, Peter De Boer (Author, Invited)

Data Science & Artifical Intelligence

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	English
Title of host publication	2019 IEEE International Conference on Prognostics and Health Management (ICPHM)
Pages	1-8
Number of pages	8
Publication status	Published - 2019
Event	IEEE International Conference on Prognostics and Health Management (PHM2019) - Duration: 17 Jun 2019 → 19 Jun 2019

Conference

Conference	IEEE International Conference on Prognostics and Health Management (PHM2019)
Period	17/06/19 → 19/06/19

Research Field

Former Research Field - Data Science

Cite this

@inproceedings{cfdd56f3ce6a4a8aa466d4961c031021,

title = "Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning",

author = "Anahid Naghibzadeh-Jalali and Clemens Heistracher and Alexander Schindler and Bernhard Haslhofer and Tanja Nemeth and Robert Glawar and Wilfried Sihn and \{De Boer\}, Peter",

year = "2019",

language = "English",

isbn = "978-1-5386-8357-6",

pages = "1--8",

booktitle = "2019 IEEE International Conference on Prognostics and Health Management (ICPHM)",

note = "IEEE International Conference on Prognostics and Health Management (PHM2019) ; Conference date: 17-06-2019 Through 19-06-2019",

}

Naghibzadeh-Jalali, A, Heistracher, C, Schindler, A, Haslhofer, B, Nemeth, T, Glawar, R, Sihn, W & De Boer, P 2019, Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. in 2019 IEEE International Conference on Prognostics and Health Management (ICPHM). pp. 1-8, IEEE International Conference on Prognostics and Health Management (PHM2019), 17/06/19.

Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. / Naghibzadeh-Jalali, Anahid (Author, Invited); Heistracher, Clemens (Speaker, Invited); Schindler, Alexander (Author, Invited) et al.
2019 IEEE International Conference on Prognostics and Health Management (ICPHM). 2019. p. 1-8.

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

TY - GEN

T1 - Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

A2 - Naghibzadeh-Jalali, Anahid

A2 - Heistracher, Clemens

A2 - Schindler, Alexander

A2 - Haslhofer, Bernhard

A2 - Nemeth, Tanja

A2 - Glawar, Robert

A2 - Sihn, Wilfried

A2 - De Boer, Peter

PY - 2019

Y1 - 2019

M3 - Conference Proceedings with Oral Presentation

SN - 978-1-5386-8357-6

SP - 1

EP - 8

BT - 2019 IEEE International Conference on Prognostics and Health Management (ICPHM)

T2 - IEEE International Conference on Prognostics and Health Management (PHM2019)

Y2 - 17 June 2019 through 19 June 2019

ER -