Process temperature dependent high frequency capacitance-voltage response of ZrO<inf>2</inf> / GeO<inf>2</inf> /germanium capacitors

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@article{453aea00a78b4b4c87d92adf009ed9d3,

title = "Process temperature dependent high frequency capacitance-voltage response of ZrO2 / GeO2 /germanium capacitors",

author = "O. Bethge and S. Abermann and C. Henkel and C.J. Straif and H. Hutter and J. Smoliner and E. Bertagnolli",

year = "2010",

doi = "10.1063/1.3295698",

language = "Undefined/Unknown",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Process temperature dependent high frequency capacitance-voltage response of ZrO2 / GeO2 /germanium capacitors

AU - Bethge, O.

AU - Abermann, S.

AU - Henkel, C.

AU - Straif, C.J.

AU - Hutter, H.

AU - Smoliner, J.

AU - Bertagnolli, E.

PY - 2010

Y1 - 2010

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-76449099281&partnerID=MN8TOARS

U2 - 10.1063/1.3295698

DO - 10.1063/1.3295698

M3 - Artikel

SN - 0003-6951

JO - Applied Physics Letters

JF - Applied Physics Letters

ER -