Properties of Mg-doped ZnO films grown by atomic layer deposition

O. Bethge, Theodoros Dimopoulos, Martin Bauch, Raad Hamid, Emmerich Bertagnolli, Jatinder Kaur (Speaker)

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation

Original language	English
Title of host publication	EMRS 2016 spring meeting
Publication status	Published - 2016
Event	EMRS 2016 spring meeting - Duration: 2 May 2016 → 6 May 2016

Conference	EMRS 2016 spring meeting
Period	2/05/16 → 6/05/16

Research Field

@inproceedings{1ecc07ef02bb4cbe826d59c0e1e0ce65,

title = "Properties of Mg-doped ZnO films grown by atomic layer deposition",

author = "O. Bethge and Theodoros Dimopoulos and Martin Bauch and Raad Hamid and Emmerich Bertagnolli and Jatinder Kaur",

year = "2016",

language = "English",

booktitle = "EMRS 2016 spring meeting",

note = "EMRS 2016 spring meeting ; Conference date: 02-05-2016 Through 06-05-2016",

}

TY - GEN

T1 - Properties of Mg-doped ZnO films grown by atomic layer deposition

AU - Bethge, O.

AU - Dimopoulos, Theodoros

AU - Bauch, Martin

AU - Hamid, Raad

AU - Bertagnolli, Emmerich

A2 - Kaur, Jatinder

PY - 2016

Y1 - 2016

M3 - Conference Proceedings with Oral Presentation

BT - EMRS 2016 spring meeting

T2 - EMRS 2016 spring meeting

Y2 - 2 May 2016 through 6 May 2016

ER -