Pt-assisted oxidation of (100)-Ge/high-k interfaces and improvement of their electrical quality

C. Henkel, O. Bethge, Stephan Abermann, S. Puchner, H. Hutter, E. Bertagnolli

Research output: Contribution to journal › Article › peer-review

Research Field

@article{af6041eb85804896a67c737c8515cc7d,

title = "Pt-assisted oxidation of (100)-Ge/high-k interfaces and improvement of their electrical quality",

author = "C. Henkel and O. Bethge and Stephan Abermann and S. Puchner and H. Hutter and E. Bertagnolli",

year = "2010",

language = "English",

volume = "97",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "152904",

}