Sputter redeposition as a limit to spatially 3-dimensional SIMS microanalysis

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation

Original language	German
Title of host publication	21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-
Publication status	Published - 1986
Event	21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print- - Duration: 1 Jan 1986 → …

Conference	21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-
Period	1/01/86 → …

Research Field

@inproceedings{e4548e07aca34fdcb040af4c0474f82a,

title = "Sputter redeposition as a limit to spatially 3-dimensional SIMS microanalysis",

keywords = "FZS-000IPP, FZS-300IPX, FZS-000IPP, FZS-300IPX",

author = "Friedrich R{\"u}denauer",

year = "1986",

language = "Deutsch",

booktitle = "21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-",

note = "21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print- ; Conference date: 01-01-1986",

}

TY - GEN

T1 - Sputter redeposition as a limit to spatially 3-dimensional SIMS microanalysis

AU - Rüdenauer, Friedrich

PY - 1986

Y1 - 1986

KW - FZS-000IPP

KW - FZS-300IPX

KW - FZS-000IPP

KW - FZS-300IPX

M3 - Vortrag mit Beitrag in Tagungsband

BT - 21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-

T2 - 21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-

Y2 - 1 January 1986

ER -