| Original language | German |
|---|---|
| Pages (from-to) | 442 |
| Number of pages | 1 |
| Journal | Elektrotechnik und Informationstechnik (e & i) |
| Volume | 12 |
| Publication status | Published - 2005 |
Research Field
- Not defined
Status and trends in modern micro- and nanotechnology
- H. Brückl
- , R. Hainberger
- , R. Heer
- , A. Köck
Research output: Contribution to journal › Article