Skip to main navigation Skip to search Skip to main content

Status and trends in modern micro- and nanotechnology

  • H. Brückl
  • , R. Hainberger
  • , R. Heer
  • , A. Köck

Research output: Contribution to journal › Article

Original languageGerman
Pages (from-to)442
Number of pages1
JournalElektrotechnik und Informationstechnik (e & i)
Volume12
Publication statusPublished - 2005

Research Field

  • Not defined

Cite this