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Use of electron beam techniques to study ion deposition in secondary ion mass spectrometry sputter craters

  • J.D. Brown
  • , Friedrich Rüdenauer

    Research output: Contribution to journal › Article

    Original languageEnglish
    Pages (from-to)2727-2732
    Number of pages6
    JournalJ. Appl. Phys.(15 Apr 1985)
    Publication statusPublished - 1985

    Research Field

    • Not defined

    Keywords

    • FZS-000PHP

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